DNS FC-3000 WET STATION > Equipment

DNS FC-3000 WET STATION S/N  630300087A 

Korea FAB IN : Feb ,2022

EQUIPMENT DETAILS:

Currently configured for 300mm wafer sizes MFG Date: 2005

Bath 1

APM (35/65°C, 20 L/min, circulation)  Chemical spiking: auto concentration feed back Bath material : Quartz

Megasonic : 730kHz, 600W*2

Bath 2 Cold DIW

Rinse (25°C, 30 L/min) Bath material : Quartz

Megasonic : 730kHz, 600W*2

Bath 3 Cold DIW

Rinse (25°C, 30 L/min) Chemical injection: APM Bath material :Quartz

Bath 4 Cold DIW

Rinse (25°C, 30 L/min) Bath material : Quartz

Bath 5

SPM (110°C, 20 L/min, circulation) Chemical spiking: periodic spiking Bath material :Quartz

Bath 6 Hot DIW

Rinse (75°C, 30 L/min) Bath material: Quartz

Megasonic: 730 kHz, 600W*2

DRYER (LPD) IPA/N2 170°C

200 L/min

Missing or damaged parts: None reported. Please inspect to confirm.

Notes:

Tool is operating in clean room.

Shipment brackets and kits will need to be supplied by the buyer. Labelled as Collateral Asset.