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Asher CMP CVD Etch EPI Furnace Implant Metrology Package PVD RTP Stepper Scanner Track Wet Station Prober Tester Other

Wafer Size	Select Wafer Size 4 Inch 5 Inch 6 Inch 8 Inch 12 Inch Other
Manufacturer	Select Manufacturer ACCRETECH ADVANTEST AMAT ASM ASML AXCELIS CANON CANON ANELVA DISCO EBARA FSI FUSION GASONICS HITACHI HITACHI KOKUSAI KLA LAM LASERTEC LEICA MATTSON NANOMETRICS NIKON NISSIN NOVELLUS OLYMPUS OXFORD PANASONIC PSK RIGAKU RUDOLPH SCREEN SEMITOOL SEZ SHIBAURA SOKUDO TEL TOK TOPCON TOKYO SEIMITSU ULTRATECH ULVAC USHIO VARIAN WONIK IPS WATKINS JOHNSON YAC YOKOGAWA Other

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Status	Process	Wafer Size	Manufacturer	Equipment Name/Model	Remark	GEF Item Number

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