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ETCH > AMAT
- MANUFACTURER : AMAT
- MODEL : AMAT CENTURA HDP _ULTIMA
- PROCESS : dry etching
- SIZE(mm) : 200
- VINTAGE : 1996
- S/N : 8162
- GEF_ID :
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Description
Tool ID CW-DE-05
Tool Serial Number 8162
Vendor AMAT
Model Centura HDP ULTIMA
Vintage May. 1996
Process Contact window dry etching
Wafer Size 8”
Wafer Shape Notch
Wafer Cassette 8" Plastic Miraial
SMIF Interface NO
82-31-221-8400